| 摘要 |
A metal/semiconductor/metal (MSM) back-to-back Schottky diode, a resistance memory device using the MSM diode, and associated fabrication processes are provided. The method includes: providing a substrate; forming a metal bottom electrode overlying the substrate, having a first work function; forming a semiconductor layer overlying the metal bottom electrode, having a second work function, less than the first work function; and, forming a metal top electrode overlying the semiconductor layer, having a third work function, greater than the second work function. The metal top and bottom electrodes can be materials such as Pt, Au, Ag, TiN, Ta, Ru, or TaN. In one aspect, the metal top electrode and metal bottom electrode are made from the same material and, therefore, have identical work functions. The semiconductor layer can be a material such as amorphous silicon (a:Si), polycrystalline Si, InOx, or ZnO. |
