| 摘要 |
A semiconductor fabricating apparatus including a robot unit having a wafer mapping sensor is provided to sense a quantity of wafers loaded in a cassette by the wafer mapping sensor. Wafers(100) loaded on cassette units(102,104) are picked up and transferred by a robot unit(114). The robot unit has a wafer mapping sensor(106) sensing a quantity of the wafers in the cassette units, a wafer detecting fiber sensor(108) sensing the existence of the wafer when the wafer is picked up, and a vacuum hole(110) served as a vacuum member when the wafer is picked up. A vacuum sensor is connected to the vacuum hole to sense proper vacuum when the wafer is picked up.
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