摘要 |
<p>An illumination apparatus for illuminating a mask (200) having a pattern, using light from a light source (102), includes a generating section (140-152) for generating an effective light source distribution for a modified illumination to the mask, a polarization setting section (110) for setting a predetermined polarization state in plural areas in the effective light source distribution, and an adjusting section (160) for commonly controlling a polarization state of each area.
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