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发明名称
LOADING DEVICE FOR CHEMICAL MECHANICAL POLISHER OF SEMICONDUCTOR WAFER
摘要
申请公布号
EP1743362(A1)
申请公布日期
2007.01.17
申请号
EP20050805012
申请日期
2005.04.08
申请人
DOOSAN DND CO., LTD.
发明人
LEE, JUNG
分类号
H01L21/304;B24B37/04
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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