ULTRA-HIGN VACUUM PRESSURE MEASURING SYSTEM OF A VACUUM CONTAINER BY COUNTING OF PHOTOELECTRON

摘要

A system for measuring ultra-high vacuum pressure of a vacuum container by photoelectron coefficient is provided to block the leakage of the vacuum and easily measure the vacuum pressure by minimizing the attachment of the sensors installed by penetrating the vacuum chamber or the vacuum container. A system for measuring ultra-high vacuum pressure of a vacuum container(10) by photoelectron coefficient is composed of the vacuum container formed with the predetermined vacuum; a laser irradiation unit irradiating a laser(72) through a transparent window(49); a fine channel plate(70) installed in the vacuum container to detect the photoelectron; an ion amplifier(42) connected with the fine channel plate to amplify the number of the photoelectron; a spectrum analyzer(44) connected with the ion amplifier to analyze the number of the amplified photoelectron; and a current-pressure converter(46) converting the output current of the spectrum analyzer into the corresponding pressure.