DEVICE FOR COVERING SUBSTRATES IN A ROTATING MANNER,申请号EP20050738799-传众专利搜索

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发明名称	DEVICE FOR COVERING SUBSTRATES IN A ROTATING MANNER
摘要
申请公布号	EP1743220(A2)	申请公布日期	2007.01.17
申请号	EP20050738799	申请日期	2005.04.19
申请人	SSE SISTER SEMICONDUCTOR EQUIPMENT GMBH	发明人	HOFFMANN, DIRK
分类号	G03F7/16;H01L21/00	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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