| 摘要 |
Semiconductor fabricating equipment and a method for controlling an interlock thereof are provided to allow an operator to open a corresponding panel adjacent to a problematic unit by dividing a front panel into several panels. Semiconductor fabricating equipment includes a case(110) housing plural processing units, a cover covering an opened front of the case, and at least one panel(130) provided on the cover corresponding to the processing unit and being detachable from the cover to open a portion of the cover. If at least one of the processing units is out of order, the panel corresponding to the processing unit is opened to repair the corresponding process unit. The open/shut of the panel is detected by an optical sensor.
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