MULTI-SCALE CANTILEVER STRUCTURES HAVING FINE HOLES OF NANO SIZE AND THE PREPARATION METHOD THEREOF

摘要

A multi-scale cantilever structure with fine holes of a nano size and a manufacturing method thereof are provided to secure the delicate sensor with sensitivity and selectivity by forming plural fine holes having a nano size in the alumina. A multi-scale cantilever structure is composed of an aluminum base(10) having a first area having a t1 height and a second area having a t2 height higher than the t1; a cantilever(120) made of the alumina formed on the aluminum base, and formed with a body part connected to the second area and a projected part projected from the body part to the first area and separated from the surface of the first area; a metal thin film layer(130) laminated on the cantilever; and a fourth layer(140) laminated on the metal thin film layer. The fourth layer is a photosensitive film layer.