| 摘要 |
A process line for manufacturing a semiconductor device is provided to selectively drive a front monitor and a back monitor in process equipment by using a front monitor selecting switch and a back monitor selecting switch on a working area and a service area. An air shower room(100) removes a particle attached on a body of an engineer. The engineer passing through the air shower room controls process equipments(104a,104b,104c,104d,104e,104f) for manufacturing a semiconductor device in a working area(102). The process equipments are formed on the right and left from the working area. A front monitor(108) and a back monitor(110) are installed on the process equipment to monitor the inside thereof. Service air lines(106a,106b) control the process equipments. A front monitor selecting switch(112) is formed on the working area side to select the front monitor of the process equipment. A back monitor selecting switch(114) is formed on the service area side to select the back monitor of the process equipment.
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