| 摘要 |
A boat of a semiconductor fabricating apparatus is provided to remove a particle source and avoid loss of a wafer by decreasing the number of rods and by extending a period of replacing a boat. A plurality of rods(120) are vertically arranged. A plurality of rings(200) are vertically installed in the plurality of rods, separated from each other. Each rod includes a plurality of support units(130) on a corresponding one of the plurality of rings such that the support unit protrudes in a direction horizontal with the ring. A wafer(W) is loaded into a gap between the support units.
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