发明名称 |
Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method |
摘要 |
In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.
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申请公布号 |
US7163197(B2) |
申请公布日期 |
2007.01.16 |
申请号 |
US20010957470 |
申请日期 |
2001.09.21 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAIHSA |
发明人 |
YOSHIOKA NAOKI;KAWAMOTO TATSUSHI;KAWAO MITSUSHI;MATSUNO SHIGERU;YAMADA AKIRA;MIYASHITA SHOJI;UCHIKAWA FUSAOKI |
分类号 |
B01F3/04;H01L21/205;B01D1/00;C23C16/448;F16K11/20;F16K31/122 |
主分类号 |
B01F3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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