| 发明名称 |
SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY |
| 摘要 |
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure. ® KIPO & WIPO 2007
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| 申请公布号 |
KR20070007936(A) |
申请公布日期 |
2007.01.16 |
| 申请号 |
KR20067024104 |
申请日期 |
2006.11.17 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
TIEBEN ANTHONY MATHIUS;LYSTAD JOHN;HALBMAIER DAVID L. |
| 分类号 |
B65D85/30;B65D85/38;H01L21/00;H01L21/673 |
主分类号 |
B65D85/30 |
| 代理机构 |
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