发明名称 |
DEVICE FOR DETECTING CONDITION OF CHEMICAL FILTER |
摘要 |
<p>An apparatus for detecting a chemical filter status is provided to prevent blockade of pores of the chemical filter due to a particle element or an air bubble by venting a floating material and an air bubble in a chemical filter. An air bubble exhaust line(32) is connected to a chemical filter(30) to form a path for removing air bubbles. An air bubble sensor(38) is installed on the air bubble exhaust line to detect air bubble generation status. An air valve(34) is opened and closed to remove the air bubbles in response to a predetermined control signal. A vent pump(39) pumps in response to a predetermined control signal so that the air bubbles are exhausted to a drain line. A controller(20) drives the vent pump when the air bubble is detected from the air detecting sensor to control that floating matter in the chemical filter is removed.</p> |
申请公布号 |
KR20070007450(A) |
申请公布日期 |
2007.01.16 |
申请号 |
KR20050062079 |
申请日期 |
2005.07.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JONG HAW |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|