| 摘要 |
A slurry supply arm of CMP equipment is provided to facilitate coupling and decoupling of an arm body and a shaft by improving the coupling structure of the arm body and the shaft in a slurry supply arm. A shaft(150) is composed of a shaft body and a shaft head formed on the shaft body, including a DIW(deionized water) supply hole and a tube receiving hole vertically penetrating the shaft body and the shaft head. A nozzle is formed at an end of a slurry supply tube that is inserted into the tube receiving hole to supply slurry. Upper and lower shaft coupling parts are recessed by a predetermined depth in the upper and lower parts of one side of an arm body(110). The arm body has a DIW transfer hole connected to the DIW supply hole, including a plurality of DIW spouting hole connected to the DIW transfer hole and equipped with a tube receiving groove for receiving the slurry supply tube. The lower part of the arm body is covered with a lower cover including a DIW injection nozzle connected to the DIW spouting hole. The shaft and the arm body are coupled by a plurality of bolts(170) penetrating the shaft head and the upper and lower shaft coupling part and a plurality of nuts(172) for fixing the bolts. The upper shaft coupling part is covered with an upper cover(112).
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