| 摘要 |
A substrate bonding apparatus for a liquid crystal display device panel includes an upper chamber plate, a lower chamber plate opposing the upper chamber plate, an upper low vacuum chamber provided on the upper chamber plate, a lower low vacuum chamber provided on a rear surface of the lower chamber plate, a sealing member provided on the lower chamber plate, the sealing member projecting from a top surface of the lower chamber plate at a predetermined height to contact the upper chamber plate to form a high vacuum chamber therein, at least two holes provided in each of the upper and lower chamber plates, at least two flow shut-off systems shutting off each of the holes, vacuum pumping system for reducing pressures of the upper and lower low vacuum chambers to low vacuum states, and reducing the high vacuum chamber to a high vacuum state, and upper and lower stages provided to upper and lower chamber plates, respectively, within an inside space of the high vacuum chamber to affix first and second substrates of the liquid crystal display device panel, respectively.
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