THE SENSOR FOR MEASURING TILT ANGLE AND ITS MANUFACTURING METHOD

摘要

An inclination angle measuring sensor and a method for manufacturing the same are provided to improve the linearity and the resolution by using a method for decreasing the nonlinearity by changing the form of a beam. An inclination angle measuring sensor includes a mass(600), a drive electrode(610) and a fixed electrode(620), a fixation portion(630), and a support beam(640). The mass reacts according to the change of the gravitational force. The electric capacities of the drive electrode and the fixed electrode are changed according to the change of the mass. The fixation portion fixes the mass to the bottom. The support beam connects the mass and the fixation portion. The support beam has at least one resiliency.