发明名称 Pressure sensor with monolithic body and circuit-bearing membrane attached thereto
摘要 An absolute or relative pressure sensor formed of a monolithic plastic body ( 2 ) includes a carrier body ( 3 ) and a membrane ( 4 ). A printed circuit including wire strain gauges and comprised of a polymer paste is disposed on the membrane ( 4 ). The membrane ( 4 ) is shaped so as to be very soft affording high pressure sensitivity, while the circuit includes electric terminals ( 7 ) which may be embedded in the monolithic body ( 2 ) during manufacture to eliminate subsequent mounting of these terminals in simplifying production and reducing cost. By connecting the membrane ( 4 ) to an element embedded in the monolithic body ( 2 ), membrane elasticity may be adjusted to provide the pressure sensor with a desired sensitivity for a specific application. The embedded element is preferably formed as a core of the membrane which is completely surrounded by the plastic monolithic body ( 2 ) using a vacuum container ( 8 ).
申请公布号 US7162925(B2) 申请公布日期 2007.01.16
申请号 US20050122693 申请日期 2005.05.05
申请人 METALLUX AG 发明人 DIETRICH FRANK
分类号 G01L9/06;B01D29/00;G01L1/22;G01L7/08;G01L9/00;G01L9/04;G01L19/14 主分类号 G01L9/06
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