| 摘要 |
An apparatus for manufacturing or inspecting semiconductors comprising a main body, an opening arranged in the main body, and a safety door. The safety door includes a first door element for covering a first portion of the opening and a second door element for covering a second portion of the opening, the first door element having a movement direction along which the first door element is driven by a driving device, the second door element being urged toward the first door element along the movement direction of the first door element by an external force. If a part of a person's body should be caught between the first and second door elements, the second door element is urged against the external force by the force generated by the part of the person's body to protect the part of the person's body.
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