| 摘要 |
A substrate fixing plate is provided to prevent swinging and damage of glass substrates with various sizes by using single plate, in which a substrate fixing member is mounted on a surface of the plate. A substrate fixing plate includes plural substrate fixing members(11) respectively fixed at a position corresponding to a predetermined portion of a glass substrate. The substrate fixing member has a support rod(11-1) having plural substrate fixing members(11), a first metal rod(11-2A) positioned in the support rod, and a second metal rod(11-2B) closely contacting an inner surface of the first metal rod. A lower end of the substrate fixing member is fixed to a plate(10). The metal rod is made of a material having lower thermal expansion coefficient than that of the first metal rod. |
