| 摘要 |
<p>Provided is a polymer comprising a norbornene derivative having a lactone group and a secondary hydroxy group as a repeating unit, which has excellent adhesion, shelf stability and dry etching resistance, shows a high resolution and excellent process window, and forms an excellent profile. The polymer is represented by the following formula 1. In the formula 1, each of R1 and R2 independently represents H or a C1-C30 containing alkyl, ether, ester, carbonyl, acetal, epoxy, nitrile or aldehyde, or not; R3 is H or methyl; R4 is methyl; X is a (meth)acrylate derivative, and belongs to the same class as the compound represented by repeating units m and n, with the proviso that both are not the same; and each of l, m, n and o is a number representing repeating units in the backbone, l+m+n+o=1, l/(l+m+n+o) is greater than 0.1 and less than 0.8, m/(l+m+n+o) is greater than 0.1 and less than 0.7, n/(l+m+n+o) is equal to or greater than 0.1 and less than 0.7, and o/(l+m+n+o) is equal to or greater than 0 and less than 0.5.</p> |
