Adjustable cassette for accommodating substrates and method for adjusting same

摘要

An adjustable cassette ( 1 ) for accommodating substrates includes a frame ( 10 ), a pair of supporting plate ( 20 ) with a plurality of retaining members ( 208 ) facing each other, and an adjusting means for joining of the supporting plates to the frames and thereby forming the cassette. At least one supporting plate can slide away from or close to another supporting plate and be fixed by means of the adjusting means.