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发明名称
METHOD FOR ETCHING HIGH DIELECTRIC CONSTANT MATERIALS AND FOR CLEANING DEPOSITION CHAMBERS FOR HIGH DIELECTRIC CONSTANT MATERIALS
摘要
申请公布号
KR100667723(B1)
申请公布日期
2007.01.15
申请号
KR20040097222
申请日期
2004.11.25
申请人
发明人
分类号
B01J19/08;H01L21/3065;B08B7/00;C23C16/44;H01L21/20;H01L21/304;H01L21/306;H01L21/31
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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椅(B)
