METHOD OF FORMING A WIRE USING THE CARBON NANO-TUBE

摘要

A method for forming a wire using a carbon nano-tube is provided to form easily a carbon nano-tube wire having a desired profile by providing source gas and growing the carbon nano-tube from a metal pattern for catalysis. A sacrificial layer pattern(110) is formed on a substrate(100). An insulating layer is formed on the substrate. An insulating layer having a contact hole is formed by etching the insulating layer and the sacrificial layer pattern. A spacer is formed on a sidewall of the contact hole. A metal pattern(150) for catalysis is formed within the contact hole having the spacer and is electrically connected with the substrate. A tunnel for wire is formed between the substrate and the insulating layer pattern by removing the sacrificial layer pattern and the spacer. A carbon nano-tube wire(170) is formed within the tunnel in order to be connected with the metal pattern for catalysis.