| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain enhancement of control accuracy, downsizing and reduction of power consumption of an applied device. <P>SOLUTION: A portion of a laser output from a light source 6 and reflected by the mirror part of a MEMS (Micro Electro Mechanical System) mirror 7 is reflected and condensed in a photodetector 5 by a reflection hologram. A control arithmetic circuit 3 rotates and drives the mirror part of the MEMS mirror 7 via a MEMS driving circuit 4 on the basis of an electric signal corresponding to the tilt angle of the mirror part of the MEMS mirror 7 output by the photodetector 5 and controls the tilt angle of the mirror part so as to be a target angle. <P>COPYRIGHT: (C)2007,JPO&INPIT |
