| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost probe assembly compared with former. SOLUTION: A probe is arranged in one surface, and on the other surface, a ceramics substrate on which connection terminals electrically connected with each probe are arranged is formed by splitting into a plurality of substrate parts. By using a frame and holding a plurality of ceramics substrate parts in one body as a plate, a probe substrate of desired size can be obtained. COPYRIGHT: (C)2007,JPO&INPIT
|
