发明名称 |
MULTI-STABLE MICRO ELECTROMECHANICAL SWITCHES AND METHODS OF FABRICATING SAME |
摘要 |
A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.
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申请公布号 |
US2007009203(A1) |
申请公布日期 |
2007.01.11 |
申请号 |
US20060532689 |
申请日期 |
2006.09.18 |
申请人 |
RECEVEUR ROGIER;HABETS PHILIPPE;DANZL RALPH B;HOUBEN RICHARD P;MATTES MICHAEL F |
发明人 |
RECEVEUR ROGIER;HABETS PHILIPPE;DANZL RALPH B.;HOUBEN RICHARD P.;MATTES MICHAEL F. |
分类号 |
G02B6/26;B81B3/00;B81B5/00;H01H59/00 |
主分类号 |
G02B6/26 |
代理机构 |
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代理人 |
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主权项 |
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