PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD

摘要

A stress applied to a slot board and a dielectric for generating surface plasma is reduced by depressurizing inside a vacuum waveguide tube for propagating microwaves to high vacuum, preventing abnormal discharge in the vacuum waveguide tube and the slot board, and by reducing a pressure difference between a pressure inside the treatment chamber and that inside the vacuum waveguide tube. Thus, high quality plasma treatment is performed.