摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for precisely manufacturing a quartz glass tube having excellent surface property. <P>SOLUTION: In the manufacture of the quartz glass tube, the inside of a quartz glass cylinder is pressurized1 while heating the quartz glass cylinder and the quartz glass cylinder is inserted into an outer periphery forming tool 4 while rotating, wherein the outer periphery forming tool 4 is formed from a carbon material having 1.5 Mg/m<SP>3</SP>specific gravity. An inert gas is desirably supplied to the outer peripheral surface of the quartz glass cylinder 1 through the outer periphery forming tool 4. The supply quantity of the inert gas is desirably 100-400 L/min. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |