| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a current sensor provided with a Hall device capable of both reducing size and variations in detection precision. <P>SOLUTION: The current sensor 100 is constituted in such a way as to detect magnetic flux B generated by a magnetic field to be detected when a current path carries a current I to be detected by the Hall device 20 provided for a semiconductor substrate 10. A vertical type Hall device 20 is constituted in such a way as to generate a Hall voltage according to the size of acting magnetic flux B when the magnetic flux B having a component in parallel with the surface of the semiconductor substrate 10 acts on a Hall plate HP by the current I to be detected with a drive current flowing in a direction perpendicular to the surface of the semiconductor substrate 10 supplied for the Hall plate HP. A wiring part 40 as a current path is integrally provided via an insulating film 30 for one surface of the semiconductor substrate 10 in which the Hall device 20 is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
