TRANSLATING/TURNING 2-DEGREE-OF-FREEDOM STAGE DEVICE AND 3-DEGREE-OF-FREEDOM STAGE DEVICE USING THE SAME

摘要

A translating/turning 2-degree-of-freedom stage device capable of finely positioning a table with respect to Y and ? and movable through a long stroke for transportation. The stage device comprises at least two sets (6a, 6b) of uniaxial driving and translating/turning mechanism formed of two translating freedom degree parts with translating freedom degrees, one turning freedom degree part with turning freedom degrees, and a motor and a uniaxial driving and translating/turning mechanism formed of a motor controller, and a second mechanism part (16) with one turning freedom degree and one translating freedom degree. Thus, the stage device can perform a translating movement in the Y-direction and a turning by an angle of ?.