发明名称 TEST HEAD FOR TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce costs by decreasing the number of parts while improving reliability by surely contacting pogopins 29 to contacting terminals of a probe card 43. SOLUTION: The test head 11 for a testing device includes a pin card 16, a back board 17 connected to the pin card 16, and a pogopin head 26 for mounting a plurality of pogopins 29 contacting to the contacting terminals of the probe card 43. The back board 17 located between the pin card 16 and the pogopin head 26 is connected to the pin card 16 by a connector 22, and also, the connector 22 of the back board 17 and each pogopins 29 of the pogopin head 26 are connected by a cable 23. The test head 11 includes a movable connecting mechanism 27 for permitting the movement of the pogopin head 26, and guides 33, 47 for positioning the pogopin head 26 to contact against the probe card 43. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007003433(A) 申请公布日期 2007.01.11
申请号 JP20050186056 申请日期 2005.06.27
申请人 MICRONICS JAPAN CO LTD 发明人 WASHIO KENICHI;OSHIMA TOSHIKAZU
分类号 G01R31/28;G01R31/26;H01L21/66 主分类号 G01R31/28
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