发明名称 Process and device for positioning the mask
摘要 Aspects of the invention are directed to a device and a method for arranging/removing and aligning masks on substrates to be coated, especially for the micro-structuring of organic, electroluminescent materials (OLED) on preferably large-surface substrates, especially screens, displays and the like. In one version a process includes providing a substrate on a substrate carrier, the substrate carrier having magnets arranged peripherally around a substrate receiver area, holding the mask using electromagnets on a holding assembly moveable in several dimensions by a first movement device, determining relative positions of the mask and substrate to each other, aligning the substrate and mask with each other by actuating the first movement device such that the mask is moved relative to the substrate, if a misorientation has been determined, depositing the mask on the substrate by moving at least one of the holding assembly and the substrate carrier, and deactivating the electromagnets and holding the mask on the substrate by the magnets of the substrate carrier.
申请公布号 US2007009671(A1) 申请公布日期 2007.01.11
申请号 US20060407343 申请日期 2006.04.19
申请人 MANZ DIETER 发明人 MANZ DIETER
分类号 B05D1/32 主分类号 B05D1/32
代理机构 代理人
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