| 摘要 |
<p>A method for manufacturing RFID(Radio Frequency IDentification) tags and a structure formed by the same are provided to integrate liquid-silicon containing deposition at a cost-effective mode and offer a higher performance than the tag including an organic electronic device. The RFID tag includes a metallic antenna and/or inductor(20), a dielectric layer for insulating and supporting an IC from the metallic antenna and/or inductor, multiple diodes/transistors(40,50) formed on the dielectric layer, and multiple capacitors(30) electrically connecting the metallic antenna and/or inductor with at least a part of the diodes. The diodes have at least one semiconductor layer shared with the transistors. The capacitors have at least one metallic layer shared with the diodes, and/or at least one metallic layer shared with a contact for the diodes/transistors.</p> |
