| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid jetting head in which no crack is generated in a lower electrode even when a piezoelectric element, in which the lower electrode is formed over the whole surface of an oscillating plate, is formed, a liquid jetting apparatus, and a method for manufacturing the liquid jetting head. SOLUTION: The liquid jetting head is equipped with the piezoelectric element comprising a nozzle plate in which nozzle openings are formed in a row on a nozzle forming face, a pressure generating room communicated with the nozzle openings and pressurizing a liquid by a pressure generating means, the lower electrode providing the oscillating plate on the surface of a flow path-forming substrate having an empty part becoming the pressure generating room and being on the surface of the oscillating plate on the opposite side to the flow path-forming substrate and formed at a position corresponding to the pressure generating room, a piezoelectric body layer, an upper electrode. In this liquid jetting head, a region where deformation is suppressed is formed in the piezoelectric body layer positioned on the boundary between the oscillating plate and the inner wall of the flow path-forming substrate partitioning the pressure generating room. COPYRIGHT: (C)2007,JPO&INPIT
|
