发明名称 Small thin film-movable element, small thin film-movable element array and image forming apparatus
摘要 A small thin film-movable element is provided and includes: a movable portion supported elastically deformably and capable of being displaced bidirectionally in one direction and a direction reverse thereto; a first drive source for applying a physical acting force to the movable portion, in which the movable portion produces a modulating or switching function by the first drive source; and a second drive source, which is different from the first drive source, for increasing or reducing an absolute value of the physical acting force to restrain a vibration of the movable portion in driving to displace the movable portion in a first direction by the first drive source.
申请公布号 US2007007849(A1) 申请公布日期 2007.01.11
申请号 US20060482730 申请日期 2006.07.10
申请人 FUJI PHOTO FILM CO., LTD. 发明人 OGIKUBO SHINYA;NAKAMURA HIROCHIKA
分类号 H01L41/04;G02B26/08 主分类号 H01L41/04
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