发明名称 |
APPARATUSES AND METHODS FOR DETECTING DEFECTS IN SEMICONDUCTOR WORKPIECES |
摘要 |
<p>Non-contact methods and apparatuses for detecting defects such as pile-ups in semiconductor wafers are disclosed herein. An embodiment of one such method includes irradiating a portion of a semiconductor workpiece, measuring photoluminescence from the irradiated portion of the semiconductor workpiece, and estimating a density of defects in the irradiated portion of the semiconductor workpiece based on the measured photoluminescence.</p> |
申请公布号 |
WO2007005438(A2) |
申请公布日期 |
2007.01.11 |
申请号 |
WO2006US25083 |
申请日期 |
2006.06.27 |
申请人 |
ACCENT OPTICAL TECHNOLOGIES, INC.;BUCZKOWSKI, ANDRZEJ |
发明人 |
BUCZKOWSKI, ANDRZEJ |
分类号 |
C30B23/00;C30B25/00;C30B28/12;C30B28/14 |
主分类号 |
C30B23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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