发明名称 Semiconductor device having local interconnection layer and etch stopper pattern for preventing leakage of current
摘要 A semiconductor device having a local interconnection layer and a method for manufacturing the same are provided. A local interconnection layer is formed in an interlayer dielectric (ILD) layer on an isolation layer and a junction layer, for covering a semiconductor substrate, the isolation layer, and a gate pattern. An etch stopper pattern having at least one layer for preventing the etching of the isolation layer is formed under the local interconnection layer. The etch stopper pattern having at least one layer for preventing the etching of the isolation layer can be included when forming the local interconnection layer, thereby preventing leakage current caused by the etching of the isolation layer, improving the electrical characteristics of a semiconductor device, and improving the yield of a process of manufacturing a semiconductor device.
申请公布号 US2007010090(A1) 申请公布日期 2007.01.11
申请号 US20060517087 申请日期 2006.09.07
申请人 NAM DONG-KYUN;SHIN HEON-JONG;JI HYUNG TAE 发明人 NAM DONG-KYUN;SHIN HEON-JONG;JI HYUNG TAE
分类号 H01L21/334;H01L21/4763;H01L21/311;H01L21/335;H01L21/60;H01L29/80 主分类号 H01L21/334
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