发明名称 Integration of capacitive elements in the form of perovskite ceramic
摘要 The use of a conductive bidimensional perovskite as an interface between a silicon, metal, or amorphous oxide substrate and an insulating perovskite deposited by epitaxy, as well as an integrated circuit and its manufacturing process comprising a layer of an insulating perovskite deposited by epitaxy to form the dielectric of capacitive elements having at least an electrode formed of a conductive bidimensional perovskite forming an interface between said dielectric and an underlying silicon, metal, or amorphous oxide substrate.
申请公布号 US2007007565(A1) 申请公布日期 2007.01.11
申请号 US20060407681 申请日期 2006.04.20
申请人 UNIVERSITE FRANCOIS RABELAIS, UFR SCIENCES & TECHNIQUES 发明人 GOUX LUDOVIC;GERVAIS MONIQUE
分类号 H01L29/94 主分类号 H01L29/94
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