发明名称 |
Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process |
摘要 |
A process and an apparatus is disclosed for forming refractory metal layers employing pulse nucleation to minimize formation of a concentration boundary layer during nucleation. The surface of a substrate is nucleated in several steps. Following each nucleation step is a removal step in which all reactants and by-products of the nucleation process are removed from the processing chamber. Removal may be done by either rapidly evacuating the processing chamber, rapidly introducing a purge gas therein or both. After removal of the process gas and by-products from the processing chamber, additional nucleation steps may be commenced to obtain a nucleation layer of desired thickness. After formation of the nucleation layer, a layer is formed adjacent to the nucleation layer using standard bulk deposition techniques.
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申请公布号 |
US2007009658(A1) |
申请公布日期 |
2007.01.11 |
申请号 |
US20010023125 |
申请日期 |
2001.12.17 |
申请人 |
YOO JONG H;LU XINLIANG;CHEN CHILIANG;LAI KEN K;KAO CHIEN-TEH |
发明人 |
YOO JONG H.;LU XINLIANG;CHEN CHILIANG;LAI KEN K.;KAO CHIEN-TEH |
分类号 |
C23C16/00;C23C16/14;C23C16/44;C23C16/455;C30B25/02;H01L21/285 |
主分类号 |
C23C16/00 |
代理机构 |
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地址 |
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