发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can individually mold a plurality of semiconductor chips mounted on a single face of a substrate. <P>SOLUTION: The semiconductor device manufacturing method consists of steps of arranging a plurality of semiconductor elements 102 on the surface of a substrate 100; fixing the rear face side of the substrate 100 on a lower metal mold 130; supplying a liquid resin 114 to each semiconductor element 102 from a nozzle 112 so that at least part of each semiconductor element 102 is covered by the liquid resin 114; pressing an upper metal mold, formed with a plurality of cavities 144, on one surface against the lower metal mold, and then molding the liquid resin 114 by these cavities 144 at a predetermined temperature; and separating the cavities 144 of the upper metal mold 140 from the substrate to form a plurality of individual mold resins, as a lump on the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007005727(A) 申请公布日期 2007.01.11
申请号 JP20050187137 申请日期 2005.06.27
申请人 TEXAS INSTR JAPAN LTD 发明人 TAKAHASHI YOSHIMI
分类号 H01L21/56 主分类号 H01L21/56
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