| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of light or radio-active ray detector and an imaging device assuring easier manufacturing thereof without destruction of patterns. <P>SOLUTION: After a semiconductor thick film 31 is formed, a read pattern is laminated with a carrier collecting electrode 33, a capacitor Ca, a thin film transistor Tr, a data line 34, and a gate line. Since the semiconductor thick film 31 is already formed on the occasion of laminating and forming the read pattern, the read pattern can be laminated and formed without depending on temperature at the time of forming the semiconductor thick film 31. As a result, a flat-panel X-ray detector (FPD) 3 can be manufactured easily without breakdown of the read pattern. <P>COPYRIGHT: (C)2007,JPO&INPIT |
