| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining apparatus which has a simple structure and can simultaneously generate two modified layers piled in the thickness direction on a workpiece. <P>SOLUTION: The laser machining apparatus is equipped with a laser beam irradiation means 4 which irradiates laser beam permeable to the workpiece 2 held by a chuck table 3, and a moving means for relatively moving the chuck table 3 and the laser beam irradiation means 4 for machining, wherein the laser beam irradiation means 4 includes a laser beam oscillation means 5, an optical transmission means 7 to transmit the laser beam generated by the laser beam oscillation means, and a converging lens 8 to converge the laser beam transmitted by the optical transmission means. The optical transmission means 7 has a birefringence lens 72 to separate the laser beam generated by the laser beam oscillation means 5 into normal beam and extraordinary beam. The converging lens 8 converges respectively the normal beam and the extraordinary beam separated by the birefringence lens 72, and forms the normal beam converging point and the extraordinary beam converging point. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
