| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromechanical signal selection element that can be downsized, highly integrated and detect a signal with high sensitivity. SOLUTION: The electromechanical signal selection element includes: a micro vibrator 101 that can resonate with an input signal; a stimulation electrode 102 arranged apart from the micro vibrator at a prescribed interval; and a detection electrode 103, and outputs mechanical resonance of the micro vibrator as an electric signal by detecting a change in the static capacitance between the micro vibrator and the detection electrode, and is characterized in to liquefying a sacrificing layer and to remove it when a very small gap is formed among the micro vibrator, the stimulation electrode, and the detection electrode. The electromechanical signal selection element attains minute detection of a signal with high sensitivity by "liquefying and eliminating the sacrificing layer" or "ionizing, moving and eliminating the sacrificing layer" when a very small gap is formed among the micro vibrator, the stimulation electrode, and the detection electrode. COPYRIGHT: (C)2007,JPO&INPIT
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