发明名称 |
Substrate cleaning brush, and substrate treatment apparatus and substrate treatment method using the same |
摘要 |
An inventive substrate cleaning brush includes a peripheral surface cleaning portion, and a marginal area cleaning portion connected to the peripheral surface cleaning portion. The peripheral surface cleaning portion has a peripheral surface cleaning surface to be pressed against a peripheral surface of a substrate. The marginal area cleaning portion has a marginal area cleaning surface to be pressed against a marginal area of a major surface of the substrate, and the marginal area cleaning surface projects from the peripheral surface cleaning surface by a variable projection length.
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申请公布号 |
US2007006895(A1) |
申请公布日期 |
2007.01.11 |
申请号 |
US20060482427 |
申请日期 |
2006.07.07 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
IWAMI MASAKI;SATO MASANOBU |
分类号 |
B08B7/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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