| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact small in corrosion or wear and remarkably small in the occurrence of particles even when exposed to a halogen based corrosive gas or the plasma under a high temperature. <P>SOLUTION: The aluminum nitride sintered compact contains 99.5 wt.% in total of Al, N and O and comprises AlN as a main crystal phase and a compound containing 3 components of Al, N and O as another crystal phase, wherein the intensity ratio (12/11) of the diffraction peak intensity 12 (lattice of spacing: 2.56-2.62) of the compound to the diffraction peak intensity 11 (lattice of spacing: 2.68-3.71) of the AlN is 1-8% when the sintered compact is measured by X-ray diffraction (emission source of X-ray: copper) and the diffraction peak intensity is controlled not to be existent in the lattice spacing of 1.52-1.537 and the lattice of spacing of the plane (001) of the AlN or that of the plane (002) of AlN. <P>COPYRIGHT: (C)2007,JPO&INPIT |
