| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating liquid coating apparatus which can form even coating on the whole area of a substrate by providing a coating auxiliary mechanism in the front and rear ends of the coating apparatus and initiating coating from the coating auxiliary mechanism, and to provide a method for the formation of a coating film using the apparatus. <P>SOLUTION: This coating liquid coating apparatus 300 comprises a table 220 on which an object to be treated is mounted, a slit nozzle 240 provided on the upper part of the table 220 for coating a coating liquid onto the surface of the object, a coating assisting mechanism provided on at least one side of the table 220 for initiating the coating, and a drive part 260 for moving the slit nozzle 240 in a predetermined direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
