| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a system for scheduling wafer movement in a wafer treatment tool, and its method. <P>SOLUTION: This wafer treatment tool (100) comprises a load module (102), wafer transfer unit (104), treatment module (116) and scheduler (118). The scheduler (118) is structured to generate the schedule of a wafer movement in the wafer treatment tool (100) based on the time duration of operations performed by the wafer transfer unit (104) and the treatment module (116) when a wafer is treated. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
