| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device and a substrate processing method which are capable of accurately and visually distinguishing between the processed substrates and the unprocessed substrates which are housed mixedly inside a magazine. SOLUTION: The substrate processing device successively unloads the unprocessed substrates 8 housed as laminated in the magazine 5 and successively collects the processed substrate 8' subjected to prescribed processing into the magazine 5. In the device, the processed substrates 8' are collected in the magazine 5 at positions other than those of the unprocessed substrates 8, so that the processed substrates 8' are housed at positions different from those of the unprocessed substrate 8. According to this setup, the processed substrates 8' and the unprocessed substrates 8 can be surely and visually distinguished from each other. COPYRIGHT: (C)2007,JPO&INPIT
|
