| 摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator which efficiently eliminates static electricity from circulating nonconductive solution. SOLUTION: The eliminator comprises a first arrangement 12 which pumps nonconductive solution, a second arrangement 11 to which the solution pumped by the first arrangement 12 is supplied, and a piping 15a, 15b, 16a, and 16b for circulating the solution between the arrangements 12 and 11. An end of flexible conductive materials 20 and 21 is soaked in the solution tank 18 of the first arrangement 12, and the other end is grounded. COPYRIGHT: (C)2007,JPO&INPIT
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