发明名称 |
Optical Surface Inspection |
摘要 |
The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.
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申请公布号 |
US2007009148(A1) |
申请公布日期 |
2007.01.11 |
申请号 |
US20050160707 |
申请日期 |
2005.07.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BRASEN GERNOT;LAUE CHRISTIAN;LOEFFLER MATTHIAS;THEUER HEIKO |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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